Pump with mist eliminator Vintage: 1992 Condition: rebuilt or as is
5
3250 (rebuilt) 2000 (as is)
stock
Metricon
Metrology
PC 200
30136
Prism coupler for index of refraction and thickness Condition: As is (parts - machine)
1
1500
stock
Nova Pure
Gas handling
200
30248
Gas scrubber
1
9000
2 to 4
Plasma Science
Sputterer
HRC 200
30202
Bench top sputtering system Turbo pump 8 inch capability Condition: rebuilt
1
17000
10
PlasmaTherm
RIE
2480
30064
RIE S/N E603007 Leybold Turbovac 450 Leybold Turbo controller Planetaries capacity (# wafers) 2-3 inch Al (25) 1-3 inch plastic (25) 1-4 inch plastic (12) Chamber diameter - 2 feet Remote controller - S/N 861639 Plasma endpoint detector 210 Condition: As is
1
15000
stock
Ramco
Asher
Ram 5
30249
Asher Condition: refurbished
1
20000
8 to 10
Rigaku
XRF
3613A
30020
XRF thin film thickness measurement system Condition: As is (parts - machine)
1
10000
stock
Rigaku
XRF
3710A
30162
XRF thin film thickness measurement system Condition: As is (parts - machine)
1
2000
stock
Rigaku
XRF
3725
30174
TXRF system with Horiba detector for measuring contamination on wafers Condition: As is - missing computer
1
10000
stock
Semigas
Gas handling
30171 30172
Gas cabinet Single bottle Condition: empty
2
1000
stock
SPI
Sputterer
12121
30134
Sputter coater Condition: refurbished
1
2500
4
Technics
Asher
Plasma Excitor 3000-1
30004
Plasma desmearing or surface treatment system Vacuum pump with blower Condition: As is
1
5000
2
Tegal
Asher
421
30225
Plasma system with ENI ACG6 power supply 500W 13.56MHz Heater 1 or 2 flow controller (manual) Timer for RF time Auto or manual tune Cage electrode: 15cm x 30cm x 19cm Vintage: 1980's Condition: refurbished
1
10000
stock
TEL
Etcher
580 LC
30247
RIE Etcher Condition: refurbished
1
50000
8 to 10
Veeco
Ion Mill
VS 1060
30178
Power supply rack Control rack Vacuum system 10 inch diffusion pump Cold trap Chamber AVC 1000 automatic valve controller Ion gun 10 inch source Process stage ESC Water cooled Rotates Variable angle of incidence Auto pressure controller Vintage: 1985 Condition: Parts machine