Axic Inc. - Microwave Etching

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Etch & Deposition Products Axic PlasmaSTAR 200 RTA, RTO, RTN MOCVD Axic Benchmark 800-II

Microwave Etching

Wafer Backside Thinning

XPL-900 SLIM

High Rate Microwave Plasma Wafer Backside Thinning Tool

XCD-790 [PDF : < 700KB]

Dry chemical plasma etcher for diode and solar substrate processing