RTP, Furnaces

• Rapid Thermal Annealing
  AS One (100, 150) (< 100 KB)
  AS Master S20 (200) (< 50 KB)
  AS Micro (< 100 KB)
  AS Pack (< 50 KB)


• Rapid Thermal Chemical Vapor Deposition Tool
  AS Master 2000 (< 50 KB)
  
  
• Low Pressure Chemical Vapor Deposition Tool
  LC100 LPCVD Furnace (< 50 KB)
  
  

• Low cost MOCVD reactors for Research and Development applications
  MC025 (< 30 KB)
  MC100 (< 60 KB)