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 ETCH & DEPOSITION (Barrel, RIE, ICP) |
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 THIN FILM MEASUREMENT (Ellipsometer, Film Thickness, n&k) |
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| RTP (Rapid Thermal Processing) | ||||
 MICROWAVE ETCH (Wafer Thinning, Dicing) |
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 REFURBISHED EQUIPMENT (Ion Mill, Sputter) |
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| "Reactive Ion Etching Equipment" |
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 Benchmark RIE/PECVD Innovative, highly flexible R&D Plasma tool. |
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