• Liquid Cooled - Rhodium (or Tungsten) Target X-Ray Tube with Recirculator
• 30 kV - 20 mA Fully Regulated Feedback Controlled X-Ray Power Supply
• Helium Environment Spectrometer with Low Delta Pressure, allowing the use of a Large Detector Window for Analysis
• Wafer Remains In Air
• Simultaneous XRF-WDS/EDS Analysis
• Proportional Counter Detectors Provide High Sensitivity and Do Not Require LN2
• Accepts Wafers to 8 inches in diameter (12 inch optional)
• Fast Analysis
• Internal Reference Calibration