•   Failure analysis applications
•   Material modification
•   Adhesion promotion Plasma descum
•   Surface treatment
•   Anisotropic and isotropic etching
•   Metal etching
•   Si02, Si3N4 and SiOxNy deposition
•   III-V etching applications
•   Trench etching
•   Passivation etching
•   Polyimide etching
•   Submicron etching