• Failure analysis applications
• Material modification
• Adhesion promotion Plasma descum
• Surface treatment
• Anisotropic and isotropic etching
• Metal etching
• Si02, Si3N4 and SiOxNy deposition
• III-V etching applications
• Trench etching
• Passivation etching
• Polyimide etching
• Submicron etching