The systems are designed for deposition and/or etch of thin films on solar cell wafers. Single or<br />
multi-layers are readily processed, and a pre-etch can be provided.<br />
<br />
Up to 12 wafers can be loaded into the transfer cassette and placed in the cassette transfer<br />
module. Wafers are moved by the robot into the process module for the specific process, deposition<br />
or etch. Upon deposition/etch completion, the wafers are then moved to another chamber<br />
for additional processing or returned to the cassette load/unload module.