Etch & Deposition - RIE | ICP | Barrel | RTP

Axic IsoLok 5000
Multichamber PECVD System for Photovoltaic Cell Processing

The IsoLok 5000 provides an attractive capability for depositing films on photovoltaic cells, providing
precise performance. Up to 4 different films can be deposited without breaking vacuum.

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Axic IsoLok® ICP Plasma System

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