Etch & Deposition - RIE | ICP | Barrel | RTP


Axic PlasmaSTAR® 200

A Unique Modular Approach to Barrel Plasma Processing

The PlasmaSTAR® Series of Plasma Processing Systems from Axic, Inc. defines a new concept in barrel plasma processing. The systems are based on a modular design concept. Starting with a universal base unit, multiple electrode modules are available for easy insertion into the base unit. You will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma.


Axic Multimode® HF-8