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Plasma ETCH & DEPOSITION (Barrel, RIE, ICP)
Ellipsometer, Thin Film THIN FILM MEASUREMENT (Ellipsometer, Film Thickness, n&k)
RTP RTP (Rapid Thermal Processing)
Wafer Thinning MICROWAVE ETCH (Wafer Thinning, Dicing)
Refurbished Equipment REFURBISHED EQUIPMENT (Ion Mill, Sputter)
RTP
AS-ONE RTP

Low cost RTP
  Benchmark
Benchmark RIE/PECVD

Innovative, highly flexible R&D Plasma tool.