Applications - Deposition

  • Dielectric Deposition

AXIC systems offer a variety of process chucks and temperature ranges for your specific dieletric processing needs.  Silane based chemistries are utilized for silicon, silicon oxides, silicon carbides, and silicon nitride films.

Application Notes:

Electrical Discharges in Vacuum - PDF 375 KB
Plasma Enhanced CVD - PECVD - 1,065 KB